Investigation of oxygen source from vapor phase and target for growth of Pb(Zr,Ti)O3 thin film
Author:
Publisher
Wiley
Subject
Electrical and Electronic Engineering,Computer Networks and Communications,General Physics and Astronomy
Reference14 articles.
1. Effect of Zr/Ti Ratio on Crystal Structure of Thin Lead Zirconate-Titanate Films Prepared by Reactive Sputtering
2. Preparation of epitaxial Pb(ZrxTi1−x)O3thin films and their crystallographic, pyroelectric, and ferroelectric properties
3. Preparation and Characterization of Pb(ZrxTi1-x)O3Thin Films by Reactive Sputtering Using an Alloy Target
4. Fatigue Characteristics of Sol-Gel DerivedPb(Zr,Ti)O3Thin Films
5. Metalorganic Chemical Vapor Deposition ofc-Axis Oriented PZT Thin Films
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