Generalized Linear Model-based Control Charts for Discrete Semiconductor Process Data

Author:

Skinner Katina R.,Montgomery Douglas C.,Runger George C.

Publisher

Wiley

Subject

Management Science and Operations Research,Safety, Risk, Reliability and Quality

Cited by 38 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

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3. Shewhart ridge profiling for the Gamma response model;Journal of Statistical Computation and Simulation;2024-01-04

4. Semiconductor Equipment Health Monitoring With Multi-View Data;2023 Winter Simulation Conference (WSC);2023-12-10

5. Gamma generalized linear model‐based control charts for high‐purity processes;Quality and Reliability Engineering International;2023-04-15

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