P-15: High-Performance Fully Transparent Hafnium-Doped Zinc Oxide TFTs Fabricated at Low Temperature

Author:

Wu Jing12,Han Dedong1,Zhao Nannan12,Chen Zhuofa12,Cong Yingying1,Zhao Feilong12,Dong Junchen12,Zhang Shengdong12,Zhang Xing1,Wang Yi1

Affiliation:

1. Institute of Microelectronics, Peking University; Beijing 100871 China

2. Shenzhen Graduate School, Peking University; Shenzhen 518055 China

Publisher

Wiley

Reference10 articles.

1. “Review paper: Transparent amorphous oxide semiconductor thin film transistor.”;Kwon;Electronic Materials Letters,2011

2. “High performance ZnO-thin-film transistor with Ta2O5 dielectrics fabricated at room temperature,”;Zhang;Appl. Phys. Lett,2009

3. “Self-aligned coplanar a-IGZO TFTs and application to high-speed circuits.”;Kang;IEEE Electron Devices Lett,2011

4. “High-performance indium-gallium-zinc oxide thin-film transistors based on anodic aluminum oxide.”;Lan;IEEE Trans. Electron Devices,2011

5. “Amorphous hafnium-indium-zinc oxide semiconductor thin film transistors.”;Kim;Applied Physics Letters,2009

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