Electron Beam Interaction with Carbon Nanotubes in Scanning Electron Microscope: Mechanisms and Applications

Author:

Chen Guo1ORCID,Yuan Zi1ORCID,Wei Yuanqi1ORCID,Fu Xuze1ORCID,Jiang Kaili12ORCID

Affiliation:

1. State Key Laboratory of Low Dimensional Quantum Physics Department of Physics Tsinghua University Beijing 100084 China

2. Frontier Science Center for Quantum Information Beijing 100084 China

Abstract

AbstractA comprehensive understanding of the interaction between electron beams and carbon nanotubes (CNTs) in scanning electron microscope (SEM) can be challenging due to the complex surface charging behavior and various nanostructures formed by CNTs. Herein, an overview of the challenges and potential solutions are provided for achieving high‐resolution imaging of nanomaterials, such as CNTs, in SEM systems. First, imaging mechanisms of CNTs on conducting, insulating, and hybrid substrates are summarized, with morphology, material type, and charging effect covered. Second, measuring the conductivity, bandgap, and diameter of a CNT by SEM method is introduced. Finally, the utilization of super‐aligned CNT (SACNT) films for observing insulators and vertically aligned CNT arrays (VACNTAs) as electron blackbodies are discussed separately. New techniques for imaging and characterizing nanostructures will ultimately lead to the advancement of CNT‐based technologies.

Funder

National Natural Science Foundation of China

National Key Research and Development Program of China

Beijing Innovation Center for Future Chip

Publisher

Wiley

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