1. State Key Laboratory of Artificial Microstructure and Mesoscopic Physics School of Physics, Nano‐Optoelectronics Frontier Center of Ministry of Education (NFC‐MOE) Peking University Beijing 100871 China
2. Songshan Lake Materials Laboratory Dongguan Guangdong 523808 China
3. Institute of Laboratory Animal Science (ILAS) Chinese Academy of Medical Sciences Beijing 100021 China
4. Advanced Micro‐Fabrication Equipment Inc. Shanghai 201201 China