1. School of Integrated Circuits and Beijing National Research Center for Information Science and Technology (BNRist) Tsinghua University Beijing 100084 China
2. Tsien Excellence in Education Program (TEEP) Xingjian College Tsinghua University Beijing 100084 China
3. National and Local Joint Engineering Research Center of Space Optoelectronics Technology Changchun University of Science and Technology Changchun 130022 China
4. College of Opto‐Electronic Engineering Changchun University of Science and Technology Changchun 130022 China
5. High‐Frequency High‐Voltage Device and Integrated Circuits R&D Center Institute of Microelectronics Chinese Academy of Sciences Beijing 100029 China
6. School of Chemical Engineering and Technology Hebei University of Technology Tianjin 300130 China
7. Center for Excellence in Nanoscience (CAS) Key Laboratory of Nano system and Hierarchical Fabrication (CAS) National Center for Nanoscience and Technology Beijing 100190 China