1. State Key Laboratory of Materials for Integrated Circuits Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences Shanghai 200050 P. R. China
2. College of Materials Science and Opto‐Electronic Technology University of Chinese Academy of Sciences Beijing 100049 P. R. China
3. 2020 X‐Lab Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences Shanghai 200050 P. R. China
4. Department of Microelectronic Science and Engineering School of Physical Science and Technology Ningbo University Ningbo 315211 P. R. China