Affiliation:
1. Department of Mechanical Engineering Seoul National University Seoul 08826 Republic of Korea
2. Department of Materials Science and Engineering Korea Advanced Institute of Science and Technology Daejeon 34141 Republic of Korea
3. Inter‐University Semiconductor Research Center Seoul National University Seoul 08826 Republic of Korea
Abstract
AbstractQuasi‐2D Ruddlesden–Popper perovskite (RPP) have surfaced as a promising candidate for light emitting diodes (LEDs) due to its outstanding optoelectronic properties. However, a reliable approach for patterning RPPs remains elusive due to the use of polar solvents in lithographic processes, which can damage the RPP. Here, a reliable and damage‐free dry micropatterning method of RPPs is reported, which also offers a cost/time advantage compared to conventional patterning methods. The sharp edges of high aspect ratio silicon micropillars are used to cut RPPs to a pre‐defined shape and then the cut RPPs are delaminated to obtain a patterned array of RPPs. The resultant patterned array exhibits no sign of degradation or discernable difference between adjacent pixels, achieving a ≈100% yield. The obtained array is utilized to fabricate a pixelated LED where a sharp electroluminescence (EL) spectrum peaking at 410 nm with full‐width‐at‐half‐maximum (FWHM) of 10 nm is observed. The pixelated devices demonstrate the potential to suppress EQE drops as the pixel size decreases, attributed to both the damage‐free micropatterning process and the defect tolerance of RPPs. Moreover, further improvements of the patterning method are demonstrated to avoid parasitic emission and suggest a promising strategy to fabricate pixel‐accessible micro‐LEDs.
Funder
Institute of Engineering Research, Seoul National University
Samsung