Mass Transfer System of a Large Number of Small Objects Based on Conjunction of Triboelectric Nanogenerators and Photo‐Responsive Interface

Author:

Dong Xuanyi12,Yang Peng12,Liu Zhaoqi12,Tao Xinglin12,Qin Siyao12,Hu Jun12,Chu Xiangcheng3ORCID,Wang Zhong Lin145,Chen Xiangyu125

Affiliation:

1. CAS Center for Excellence in Nanoscience Beijing Institute of Nanoenergy and Nanosystems Chinese Academy of Sciences Beijing 100083 China

2. School of Nanoscience and Engineering University of Chinese Academy of Sciences Beijing 100049 China

3. State Key Laboratory of New Ceramics and Fine Processing School of Material Science and Engineering Tsinghua University Beijing 100084 China

4. School of Materials Science and Engineering Georgia Institute of Technology Atlanta GA 30332‐0245 USA

5. Yonsei Frontier Lab Yonsei University Seoul 03722 Republic of Korea

Abstract

AbstractMass transfer technology for large quantities of tiny substances, such as electronic chips and drug particles, plays a crucial role in many industries. This study proposes a transferring system for large quantities of small objects based on the synergism of triboelectric nanogenerators (TENGs) and photo‐responsive dielectric materials. TENG device can provide an output voltage of over 8 kV within a rotation time of 40 ms and the titanium oxide phthalocyanine (TiOPc) photoconductive films are fabricated as the photo‐responsive interface, in order to match the output impedance of TENG. The transfer system enables a maximum adsorption load of 98 mg mm−2, which is enough for handling all common electronics chips/wafers. Under the stimulation of laser light, the conductivity of the TiOPc interface can be increased by two orders of magnitude within 1 ms, which leads to the vanish of the surface potential on the laser spot and the release of patterned or pointed object. This photo‐responsive strategy can achieve both large quantity transfer of tiny objects and highly selective release of the element at designed position. This collaborative mechanism of electrostatic force and photoconductivity provides a different approach for realizing efficient and precise Mass transfer system of semiconductor and chip industry.

Funder

National Natural Science Foundation of China

Beijing Nova Program

Youth Innovation Promotion Association of the Chinese Academy of Sciences

Fundamental Research Funds for Central Universities of the Central South University

National Science Fund for Distinguished Young Scholars

Publisher

Wiley

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