Author:
Paul Oliver,Gaspar Joao,Ruther Patrick
Subject
Electrical and Electronic Engineering
Reference87 articles.
1. Silicon as a mechanical material
2. (eds). MEMS—A Practical Guide to Design, Analysis and Applications. William Andrew Publishing: Norwich (NY), USA; 2006.
3. volume (eds). CMOS—MEMS, Advanced Micro & Nanosystems Series, Vol. 2. Wiley-VCH: Weinheim, Germany; 2005.
4. Micromachining technology. Chapter 15, (eds). MEMS—A Practical Guide to Design, Analysis and Applications. William Andrew Publishing: Norwich (NY), USA); 2006.
5. . Advanced silicon etching using high density plasmas. Proceedings of the SPIE, Symposium on Micromachining and Microfabrication Process Technology, Santa Clara, USA, 1995; 2639: 211–216.
Cited by
19 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献