Jet morphology analysis of microwave‐generated plasma for microfabrication of optics
Author:
Affiliation:
1. School of Mechanical Engineering Sichuan University Chengdu China
2. Yibin Research Institute Sichuan University Yibin China
Funder
National Natural Science Foundation of China
Publisher
Wiley
Subject
Polymers and Plastics,Condensed Matter Physics
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/ppap.202200084
Reference24 articles.
1. Current status of microplasma research
2. An atmospheric-pressure, high-aspect-ratio, cold micro-plasma
3. Freeform surface generation by atmospheric pressure plasma processing using a time-variant influence function
4. A study on the etching characteristics of atmospheric pressure plasma for single-crystal silicon wafer
5. A novel Deal–Grove‐inspired model for fluorine‐based plasma jet etching of borosilicate crown optical glass
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