Compositional gradients at the nanoscale in substoichiometric thin films deposited by magnetron sputtering at oblique angles: A case study on SiO x thin films-Reference-Cited by-同舟云学术

Compositional gradients at the nanoscale in substoichiometric thin films deposited by magnetron sputtering at oblique angles: A case study on SiO x thin films

Published:2021-10 Issue:1 Volume:19 Page:2100116
ISSN:1612-8850
Container-title:Plasma Processes and Polymers
language:en
Short-container-title:Plasma Processes & Polymers

Author:

Garcia‐Valenzuela Aurelio¹,Alcaide Antonio M.¹,Rico Victor¹,Ferrer Francisco J.²³,Alcala German⁴,Rojas Teresa C.¹,Alvarez Rafael¹⁵^ORCID,Gonzalez‐Elipe Agustin R.¹^ORCID,Palmero Alberto¹

Affiliation:

1. Materials Science Institute of Seville CSIC‐Universidad de Sevilla Seville Spain

2. Centro Nacional de Aceleradores CSIC‐Universidad de Sevilla Seville Spain

3. Departamento de Física Atómica, Molecular y Nuclear Universidad de Sevilla Seville Spain

4. Departamento de Ingeniería Química y de Materiales, Facultad de Ciencias Químicas Universidad Complutense de Madrid Madrid Spain

5. Departamento de Física Aplicada I. Escuela Politécnica Superior Universidad de Sevilla Seville Spain

Funder

Ministerio de Ciencia e Innovación

Comunidad de Madrid

Consejería de Economía, Innovación, Ciencia y Empleo, Junta de Andalucía

Consejo Superior de Investigaciones Científicas

Universidad de Sevilla

Publisher

Wiley

Subject

Polymers and Plastics,Condensed Matter Physics

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/ppap.202100116

Reference51 articles.

1. Reactive Sputter Deposition

2. A review of plasma-assisted methods for calcium phosphate-based coatings fabrication

3. High quality ITO thin films grown by dc and RF sputtering without oxygen

4. Strengthening in multi-principal element alloys with local-chemical-order roughened dislocation pathways

5. Recent progress and future challenges on thermoelectric Zintl materials

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Plasmas and acoustic waves to pattern the nanostructure and chemistry of thin films;Acta Materialia;2023-08

2. Special issue: Plasmas for Biointerfaces;Plasma Processes and Polymers;2022-07