Affiliation:
1. College of Electronics and Information Engineering Sichuan University Chengdu China
2. National Institute of Measurement and Testing Technology Chengdu China
3. Materials Research Institute Pennsylvania State University University Park, State Collage Pennsylvania USA
Abstract
AbstractA microwave atmospheric pressure plasma jet (MW‐APPJ) generator based on a substrate‐integrated waveguide (SIW) resonator is proposed. A thin, straight plasma needle with a length of 9 cm could be obtained. Higher than 90% of microwave feeding efficiency is obtained under a wide range of gas flow rates without a microwave matching network. As the gas flow increased from 1 to 14 L/min, a transition from laminar to turbulent mode is observed in the plasma jet's morphology. Furthermore, a preliminary surface treatment was tested for the device. The polyimide film became super hydrophilic after a 5‐min treatment with the developed SIW‐based plasma generator. Generally, the SIW‐based MW‐APPJ is low‐cost, electrodeless, and low‐profile along the plasma jet length direction.
Funder
National Natural Science Foundation of China
Fundamental Research Funds for the Central Universities
Subject
Polymers and Plastics,Condensed Matter Physics