Effect of temperature and incident ion energy on nanostructure formation on silicon exposed to helium plasma-Reference-Cited by-同舟云学术

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Effect of temperature and incident ion energy on nanostructure formation on silicon exposed to helium plasma

Published:2020-09-06 Issue:12 Volume:17 Page:2000126
ISSN:1612-8850
Container-title:Plasma Processes and Polymers
language:en
Short-container-title:Plasma Process Polym

Author:

Thompson Matt¹^ORCID,Shi Quan²^ORCID,Kajita Shin³^ORCID,Ohno Noriyasu²^ORCID,Corr Cormac¹

Affiliation:

1. Department of Electronic Materials Engineering, Research School of Physics Australian National University Canberra Australia

2. Graduate School of Engineering Nagoya University Nagoya Japan

3. Institute of Materials and Systems for Sustainability Nagoya University Nagoya Japan

Funder

Japan Society for the Promotion of Science

Australian Research Council

Publisher

Wiley

Subject

Polymers and Plastics,Condensed Matter Physics

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/ppap.202000126

Reference37 articles.

1. Synthesis and Characterization of Manganese-Doped Silicon Nanoparticles: Bifunctional Paramagnetic-Optical Nanomaterial

2. Bifunctional CoFe2O4/ZnO Core/Shell Nanoparticles for Magnetic Fluid Hyperthermia with Controlled Optical Response

3. Gold nanoparticles – an optical biosensor for RNA quantification for cancer and neurologic disorders diagnosis

4. Prospects of Colloidal Nanocrystals for Electronic and Optoelectronic Applications

5. Self-assembled gold nanoparticle-molecular electronic networks

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Germanium nanostructures by helium plasma irradiation;Japanese Journal of Applied Physics;2024-07-01

2. Nanopatterning of Si surfaces by normal incident He plasma irradiation;Applied Physics Letters;2024-03-04

3. Cone array formation on Si surfaces by low-energy He plasma irradiation with magnetron sputtering pre-deposited Ta;Journal of Applied Physics;2024-03-01

4. Experimental study on the thermal evolution of silicon defects with zonal characteristics induced by precisely localized irradiation of focused helium ion beams;Vacuum;2023-12

5. The dependence of Mo ratio on the formation of uniform black silicon by helium plasma irradiation;Journal of Physics D: Applied Physics;2021-07-22

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