Commercialization of microcavity plasma devices and arrays: Systems for VUV photolithography and nanopatterning, disinfection of drinking water and air, and biofilm deactivation for medical therapeutics-Reference-Cited by-同舟云学术

Commercialization of microcavity plasma devices and arrays: Systems for VUV photolithography and nanopatterning, disinfection of drinking water and air, and biofilm deactivation for medical therapeutics

Published:2022-08-17 Issue:10 Volume:19 Page:2200075
ISSN:1612-8850
Container-title:Plasma Processes and Polymers
language:en
Short-container-title:Plasma Processes & Polymers

Author:

Kim Jinhong¹,Mironov Andrey E.¹²^ORCID,Cho Jin H.³⁴,Sievers Dane S.¹²,Herring Cyrus M.³,Park Sehyun¹⁵,Sun Peter P.¹⁶,Liang Zhihu³⁷,Chen Wenyuan¹⁸,Park Sung‐Jin¹²³⁷⁹,Eden J. Gary¹²³⁷⁹

Affiliation:

1. Department of Electrical and Computer Engineering University of Illinois Urbana Illinois USA

2. Cygnus Photonics, Enterprise Works University of Illinois Champaign Illinois USA

3. Eden Park Illumination Champaign Illinois USA

4. Lam Research Tualatin Oregon USA

5. Department of Physics and Astronomy Rice University Houston Texas USA

6. Intel Hillsboro Oregon USA

7. EPL Power Electronics, Enterprise Works University of Illinois Champaign Illinois USA

8. Department of Electrical Engineering California Institute of Technology Pasadena California USA

9. Eden Park Foundation Mahomet Illinois USA

Funder

Air Force Office of Scientific Research

Foundation for the National Institutes of Health

Defense Advanced Research Projects Agency

U.S. Department of Energy

Publisher

Wiley

Subject

Polymers and Plastics,Condensed Matter Physics

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/ppap.202200075

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5. K. V.Desai S.Nijdam S.‐J.Park P. P.Sun O.Sakai G.Lister J. G.Eden Plasma Sources Sci. Technol.2022.

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