Novel gas aggregation cluster source based on post magnetron
Author:
Affiliation:
1. Department of Macromolecular Physics, Faculty of Mathematics and Physics Charles University Prague Czech Republic
2. HVM Plasma Ltd. Prague Czech Republic
Publisher
Wiley
Subject
Polymers and Plastics,Condensed Matter Physics
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/ppap.202100068
Reference25 articles.
1. Thin films from energetic cluster impact: A feasibility study
2. Nanoparticle design by gas-phase synthesis
3. Magnetron-sputtered copper nanoparticles: lost in gas aggregation and found by in situ X-ray scattering
4. Nucleation and Growth of Magnetron‐Sputtered Ag Nanoparticles as Witnessed by Time‐Resolved Small Angle X‐Ray Scattering
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