1. Chemnitz University of Technology, Faculty of Natural Sciences, Institute of Chemistry, Department of Inorganic Chemistry, Straße der Nationen 62, 09111 Chemnitz, Germany, Fax: +49‐371‐531‐21219, http://www.tu‐chemnitz.de/chemie/anorg/
2. Chemnitz University of Technology, Center for Microtechnologies, 09107 Chemnitz, Germany
3. Fraunhofer Institute for Electronic Nano Systems (ENAS), Technologie‐Campus 3, 09126 Chemnitz, Germany
4. IFW Dresden, P. O. Box 270116, 01177 Dresden, Germany