Determination of the density of ultrathin La films in La/B 4 C layered structures using X‐ray standing waves-Reference-Cited by-同舟云学术

Determination of the density of ultrathin La films in La/B 4 C layered structures using X‐ray standing waves

Published:2011-10-05 Issue:11 Volume:208 Page:2597-2600
ISSN:1862-6300
Container-title:physica status solidi (a)
language:en
Short-container-title:Phys. Status Solidi A

Author:

Makhotkin I. A.¹²,Louis E.¹,van de Kruijs R. W. E.¹,Yakshin A. E.¹,Zoethout E.¹,Seregin A. Yu.²,Tereschenko E. Yu.²,Yakunin S. N.²³,Bijkerk F.¹⁴

Affiliation:

1. FOM Institute for Plasma Physics Rijnhuizen, Edisonbaan 14, 3439 MN Nieuwegein, The Netherlands

2. A.V. Shubnikov Institute of Crystallography RAS, Leninskii prospekt 59, 119333 Moscow, Russia

3. RRC Kurchatov Institute, pl. Akademika Kurchatova 1, 123182 Moscow, Russia

4. MESA and Institute for Nanotechnology, University of Twente, Drienerlolaan 5, 7522 NB Enschede, The Netherlands

Funder

Nederlandse Organisatie voor Wetenschappelijk Onderzoek

Carl Zeiss SMT AG

ASML

AgentschapNL

Publisher

Wiley

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/pssa.201184256

Reference15 articles.

1. Multilayered mirrors based on La/B4C(B9C) for X-ray range near anomalous dispersion of boron (λ≈6.7nm)

2. Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics

3. Quantitative TEM characterizations of La/B4C and Mo/B4C ultrathin multilayer gratings by the geometric phase method

4. Reflective multilayer optics for 6.7 nm wavelength radiation sources and next generation lithography

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