How to supply a CVD reactor with a steady-state mixture of two precursors vaporized from a single heated boat-Reference-Cited by-同舟云学术

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How to supply a CVD reactor with a steady-state mixture of two precursors vaporized from a single heated boat

Published:2015-06-13 Issue:7 Volume:212 Page:1527-1532
ISSN:1862-6300
Container-title:physica status solidi (a)
language:en
Short-container-title:Phys. Status Solidi A

Author:

Peev Georgi¹,Peshev Dimitar¹

Affiliation:

1. Department of Chemical Engineering; University of Chemical Technology and Metallurgy; 8 Kl. Ohridski Blvd. 1756 Sofia Bulgaria

Publisher

Wiley

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/pssa.201532339/fullpdf

Reference9 articles.

1. Technology and optoelectronic properties of APCVD Cr2O3 and Mo–Cr mixed oxide thin films

2. High vacuum chemical vapour deposition of oxides:

3. In-Situ Growth and Characterization of Highly Textured La0.9Sr0.1MnO3 Films on LaAlO3(100) Substrates

4. Piezoelectric domains in BiFeO3 films grown via MOCVD: Structure/property relationship

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