Electrochemical Fabrication of Flat, Polymer‐Embedded Porous Silicon 1D Gradient Refractive Index Microlens Arrays

Author:

Krueger Neil A.1,Holsteen Aaron L.2,Zhao Qiujie1,Kang Seung‐Kyun3,Ocier Christian R.1,Zhou Weijun4,Mensing Glennys5,Rogers John A.1,Brongersma Mark L.2,Braun Paul V.1ORCID

Affiliation:

1. Department of Materials Science and EngineeringDepartment of ChemistryFrederick Seitz Materials Research Laboratory, and Beckman InstituteUniversity of Illinois at Urbana‐ChampaignUrbanaIllinois61801USA

2. Geballe Laboratory for Advanced MaterialsStanford UniversityStanfordCalifornia94305USA

3. Department of Bio and Brain EngineeringKorea Advanced Institute of Science and Technology (KAIST)291 Daehak‐roYuseong‐guDaejeon 34141Republic of Korea

4. The Dow Chemical Company2301 N. Brazosport Blvd., B‐1470FreeportTexas77541USA

5. Department of Mechanical Science and EngineeringUniversity of Illinois at Urbana‐ChampaignUrbanaIllinois61801USA

Funder

Office of Science

U.S. Department of Energy

Dow Chemical Company

Air Force Office of Scientific Research

Publisher

Wiley

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

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