Study of Low Temperature Deposition of Nanocrystalline Diamond Films on ZnO/LiNbO3 Layered Structures Suitable for Waveguiding Layer Acoustic Wave Devices

Author:

Dekkar Damia1,Bénédic Fabien1,Floer Cécile2,Hage-Ali Sami2,Brinza Ovidiu1,Achard Jocelyn1,Elmazria Omar2

Affiliation:

1. LSPM-CNRS; Université Paris 13; 99 Avenue Jean-Baptiste Clément 93430 Villetaneuse France

2. Institut Jean Lamour-CNRS; Université de Lorraine; 2 allée André Guinier 54011 Nancy France

Funder

ANR

Direction Générale de l'Armement (DGA)

French PIA project “Lorraine Université d'Excellence”

Institut Carnot en Lorraine (ICEEL)

Publisher

Wiley

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference25 articles.

1. Surface acoustic wave devices based on nanocrystalline diamond and aluminium nitride

2. Very high frequency SAW devices based on nanocrystalline diamond and aluminum nitride layered structure achieved using e-beam lithography

3. C. Floer M. Moutaouekkil F. Bartoli H. Mishra S. Hage-Ali S. M. Murtry P. Pigeat O. Elmazria F. Bartoli T. Aubert S. Zhgoon O. Bou Matar A. Talbi IEEE Int. Ultrason. Symp 2017 1 4

4. H. Nakahata K. Higaki S. Fujii A. Hachigo H. Kitabayashi K. Tanabe Y. Seki S. Shikata 1995 IEEE Int. Ultrason. Symp 1995 361 370

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