Diamond Microstructuring by Deep Anisotropic Reactive Ion Etching-Reference-Cited by-同舟云学术

Diamond Microstructuring by Deep Anisotropic Reactive Ion Etching

Published:2018-07-25 Issue:22 Volume:215 Page:1800273
ISSN:1862-6300
Container-title:physica status solidi (a)
language:en
Short-container-title:Phys. Status Solidi A

Author:

Golovanov Anton V.¹²^ORCID,Bormashov Vitaly S.¹³,Luparev Nikolay V.¹,Tarelkin Sergey A.¹⁴,Troschiev Sergey Y.¹,Buga Sergei G.¹²,Blank Vladimir D.¹²

Affiliation:

1. Technological Institute for Superhard and Novel Carbon Materials; 7a Tsentralnaya st. 142190 Troitsk Moscow Russia

2. Moscow Institute of Physics and Technology; 9 Institutskiy per. 141700 Dolgoprudny Moscow Region Russia

3. The All-Russian Research Institute for Optical and Physical Measurements; 46 Ozernaya st. 119361 Moscow Russia

4. National University of Science and Technology MISiS; Leninsky prosp. 119991 Moscow Russia

Funder

Ministry of Education and Science of the Russian Federation

Publisher

Wiley

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/pssa.201800273/fullpdf

Reference14 articles.

1. Diamond as a material for monolithically integrated optical and optomechanical devices

2. Diamond-integrated optomechanical circuits

3. Quantum nanophotonics in diamond [Invited]

4. Dynamic properties of diamond high voltage p–i–n diodes

5. High power density nuclear battery prototype based on diamond Schottky diodes

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