Metalorganic Chemical Vapor Deposition of over 150‐nm‐Thick Quaternary AlGaInN Epitaxial Films near Alloy Composition Lattice‐Matching to GaN on Sapphire and Their Structural and Optical Characterization

Author:

Miyoshi Makoto12ORCID,Harada Hiroki1,Egawa Takashi12,Takeuchi Tetsuya3

Affiliation:

1. Research Center for Nano Devices and Advanced MaterialsNagoya Institute of Technology Nagoya 466-8555 Japan

2. Innovation Center for Multi-Business of Nitride SemiconductorsNagoya Institute of Technology Nagoya 466-8555 Japan

3. Faculty of Science and TechnologyMeijo University Nagoya 468-8502 Japan

Funder

Ministry of Education, Culture, Sports, Science and Technology

Publisher

Wiley

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

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