Synthesis of silicon nanopowder from silane gas by RF thermal plasma-Reference-Cited by-同舟云学术

Synthesis of silicon nanopowder from silane gas by RF thermal plasma

Published:2013-10-04 Issue:2 Volume:211 Page:310-315
ISSN:1862-6300
Container-title:physica status solidi (a)
language:en
Short-container-title:Phys. Status Solidi A

Author:

So Keun-Soo¹,Lee Hyunjun¹,Kim Tae-Hee¹,Choi Sooseok¹,Park Dong-Wha¹

Affiliation:

1. Department of Chemical Engineering and Regional Innovation Center for Environmental Technology of Thermal Plasma (RIC-ETTP); Inha University; 100 Inha-ro, Nam-gu Incheon 402-751 Republic of Korea

Publisher

Wiley

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference18 articles.

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4. Infrared and Raman spectra of the silicon-hydrogen bonds in amorphous silicon prepared by glow discharge and sputtering

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