Reduced porosity in metal-assisted chemical etching of vertical Si nanowire arrays by an induced magnetic field

Author:

Yun Seokhun12,Choi Chan Ho3,Patil Dipali S.3,Kim Doo Gun1,Lee Taikjin4,Song Gwang Yeom5,Heo Jaeyeong5,Shin Jae Cheol3

Affiliation:

1. Laser Tech Research Center; Korea Photonics Technology Institute; Gwangju 500-779 South Korea

2. Department of Electronics and Computer Engineering; Chonnam National University; Gwangju 500-757 South Korea

3. Department of Physics; Yeungnam University; Gyeongsan 712-749 South Korea

4. Sensor System Research Center; Korea Institute of Science and Technology (KIST); Seoul 136-791 South Korea

5. Department of Materials Science and Engineering, and Optoelectronics Convergence Research Center; Chonnam National University; Gwangju 500-757 South Korea

Funder

Ministry of Education, Science and Technology

Korea government MOTIE

Korea government (MSIP)

Publisher

Wiley

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

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