Nanometer-Scale Depth-Resolved Atomic Layer Deposited SiO2Thin Films Analyzed by Glow Discharge Optical Emission Spectroscopy-Reference-Cited by-同舟云学术

Nanometer-Scale Depth-Resolved Atomic Layer Deposited SiO2Thin Films Analyzed by Glow Discharge Optical Emission Spectroscopy

Published:2017-12-08 Issue:6 Volume:215 Page:1700864
ISSN:1862-6300
Container-title:physica status solidi (a)
language:en
Short-container-title:Phys. Status Solidi A

Author:

Zhu Zhen¹²,Modanese Chiara²^ORCID,Sippola Perttu²,Di Sabatino Marisa³,Savin Hele²

Affiliation:

1. Beneq Oy; Olarinluoma 9 02200 Espoo Finland

2. Department of Electronics and Nanoengineering, Aalto University; Tietotie 3 02150 Espoo Finland

3. Department of Materials Science and Engineering, Norwegian University of Science and Technology (NTNU); Alfred Getz vei 2B 7491 Trondheim Norway

Funder

European Union's FP7 Programme ERC

Publisher

Wiley

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. Z. Zhu P. Sippola H. Lipsanen H. Savin 2 3

2. Characterization of thin film tandem solar cells by radiofrequency pulsed glow discharge – Time of flight mass spectrometry

3. A path towards a better characterisation of silicon thin-film solar cells: depth profile analysis by pulsed radiofrequency glow discharge optical emission spectrometry

4. Interference Phenomena at Transparent Layers in Glow Discharge Optical Emission Spectrometry

5. Comprehensive Comparison of Various Techniques for the Analysis of Elemental Distributions in Thin Films

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Catalytic atomic layer deposition of amorphous alumina–silica thin films on carbon microfibers;Journal of Vacuum Science & Technology A;2024-04-12

2. Deposition and Characterization of RP-ALD SiO2 Thin Films with Different Oxygen Plasma Powers;Nanomaterials;2021-04-29

3. Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide;Nanoscale Research Letters;2019-02-12

4. Effect of dielectric and conductive targets on plasma jet behaviour and thin film properties;Journal of Physics D: Applied Physics;2018-12-13