Heterogeneous bonding between cyclo-olefin polymer (COP) and glass-like substrate by newly developed water vapor-assisted plasma, Aqua Plasma Cleaner
Author:
Affiliation:
1. Samco Inc.; Takeda, Fushimi-ku Kyoto Japan
2. SYSMEX CORPORATION; Nishi-ku Kobe Japan
Publisher
Wiley
Subject
Electrical and Electronic Engineering,Energy Engineering and Power Technology
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/eej.23164/fullpdf
Reference34 articles.
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2. UV/ozone surface modification for long-term stable hydrophilic surface of polymer microfluidic devices;Uehara;MRS Adv,2016
3. Recent developments in PDMS surface modification for microfluidic devices;Zhou;Electrophoresis,2010
4. Studies on low-temperature direct bonding of VUV, VUV/O3 and O2 plasma pretreated cyclo-olefin polymer;Shinohara;Sensors Actuators A Phys,2011
5. COP room temperature bonding by Aqua Plasma (water vapor plasma);Terai;Transact Soc Chem Micro-Nano Syst,2017
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