1. State Key Laboratory of Precision Measuring Technology and Instrument College of Precision Instrument and Opto‐electronics Engineering Tianjin University Tianjin 300072 China
2. Cyber Valley Group – Biomedical Microsystems Institute of Physical Chemistry University of Stuttgart Pfaffenwaldring 55 70569 Stuttgart Germany
3. Division of Smart Technologies for Tumor Therapy German Cancer Research Center (DKFZ) Site Dresden, Blasewitzer Str. 80 01307 Dresden Germany
4. Faculty of Medicine Carl Gustav Carus Dresden University of Technology Dresden 01307 Germany
5. Faculty of Electrical and Computer Engineering Dresden University of Technology Dresden 01187 Germany