1. Division Advanced Multi‐materials Processing Department Materials Engineering Bundesanstalt für Materialforschung und ‐prüfung (BAM) Unter den Eichen 87 12205 Berlin Germany
2. Chair of Industrial Information Technology Institute of Machine Tools and Factory Management Technical University of Berlin Pascalstr. 8‐9 10587 Berlin Germany
3. Department of SciTec Ernst‐Abbe‐Hochschule University of Applied Sciences Jena Carl‐Zeiss‐Promenade 2 07745 Jena Germany
4. Department Hybrid Microsystems Group Ceramic Tapes Fraunhofer Institute for Ceramic Technologies and Systems IKTS Michael‐Faraday‐Str.1 07629 Hermsdorf Germany
5. Department Smart Materials and Systems Fraunhofer Institute for Ceramic Technologies and Systems IKTS Winterbergstraße 28 01277 Dresden Germany
6. Department Hybrid Microsystems Fraunhofer Institute for Ceramic Technologies and Systems IKTS Winterbergstraße 28 01277 Dresden Germany