High‐Resolution Patterning of Organic–Inorganic Photoresins for Tungsten and Tungsten Carbide Microstructures-Reference-Cited by-同舟云学术

High‐Resolution Patterning of Organic–Inorganic Photoresins for Tungsten and Tungsten Carbide Microstructures

Published:2023-07 Issue:13 Volume:25 Page:
ISSN:1438-1656
Container-title:Advanced Engineering Materials
language:en
Short-container-title:Adv Eng Mater

Author:

Luitz Manuel¹^ORCID,Pellegrini Diana¹^ORCID,von Holst Miriam²^ORCID,Seteiz Khaled²^ORCID,Gröner Lukas³^ORCID,Schleyer Mario⁴,Daub Michael⁵⁶^ORCID,Warmbold Andreas⁶,Thomann Yi⁷^ORCID,Thomann Ralf⁶^ORCID,Kotz-Helmer Frederik¹⁶^ORCID,Rapp Bastian E.¹⁶⁷^ORCID

Affiliation:

1. Laboratory of Process Technology NeptunLab Department of Microsystems Engineering (IMTEK) University of Freiburg Georges-Köhler-Allee 103 79110 Freiburg Germany

2. Laboratory for MEMS Applications Department of Microsystems Engineering (IMTEK) University of Freiburg Georges-Köhler-Allee 103 79110 Freiburg Germany

3. Department of Tribology Fraunhofer Institute for Mechanics of Materials (IWM) Wöhlerstraße 11 79108 Freiburg Germany

4. Department of Component Safety and Lightweight Construction Fraunhofer Institute for Mechanics of Materials (IWM) Wöhlerstraße 11 79108 Freiburg Germany

5. Institute for Inorganic and Analytical Chemistry University of Freiburg Albertstraße 21 79104 Freiburg Germany

6. Freiburg Materials Research Center (FMF) University of Freiburg Stefan-Meier-Straße 21 79104 Freiburg Germany

7. FIT Freiburg Center of Interactive Materials and Bioinspired Technologies University of Freiburg Georges-Köhler-Allee 105 79110 Freiburg Germany

Publisher

Wiley

Subject

Condensed Matter Physics,General Materials Science

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/adem.202370043

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