Affiliation:
1. School of Petrochemical Technology Lanzhou University of Technology Lanzhou 730050 China
2. Key Laboratory of Science and Technology on Wear and Protection of Materials Lanzhou Institute of Chemical Physics Chinese Academy of Sciences Lanzhou 730000 China
Abstract
Excellent antiwear performance, high bearing capacity, and long service life are essential prerequisites for the reliability and durability of Si‐based micro/nanodevice operation. To improve the antiwear property and prolong service life of Si‐based micro‐/nanodevices under high loads, graphene oxide (GO) nanosheets, graphene quantum dots (GQDs), and ionic liquid‐capped GQDs (IL‐GQDs) are used to create three kinds of multilayer films as solid lubricants, that is, single‐component (GO)5, (GO/GQDs)5, and (GO/IL‐GQDs)5 multilayer films. The results show that (GO/IL‐GQDs)5 composite multilayer possesses excellent wear resistance under a high load of 4 N with the wear rate of 4.9 × 10−7 mm3 N−1 m−1. The superior antiwear performance of (GO/IL‐GQDs)5 composite film is mainly due to the unique 3D structure composed of GO nanosheets alternating with IL‐GQDs. The rigid GO nanosheets play a role in load‐carrying capacity, and the IL‐GQDs could delay the time of structure transformation and reduce the loss rate of transfer film, thereby effectively extending the service life of (GO/IL‐GQDs)5 composite multilayer. Such multilayers are expected to be good solid lubricating films suitable for Si‐based micro‐/nanodevices.
Funder
National Natural Science Foundation of China