Deposition of PEDOT:PSS via Atmospheric Pressure Plasma Torch

Abstract

Creating conductive biocompatible coatings with enhanced stability and adhesion can be achieved with cold plasma‐assisted processes that provide surface modification, and assisted polymerization at mild conditions and room temperature. Herein, a novel method is reported for the controlled deposition of conductive polymer poly(3,4‐ethylenedioxythiophene) polystyrene sulfonate (PEDOT:PSS) on substrates with different characteristics: polyethylene terephthalate, poly(dimethylsiloxane), and soda‐lime glass. The plasma deposited PEDOT:PSS films are studied by atomic force microscopy, scanning electron microscopy, and Fourier transform infrared spectroscopy, and tested for stability and adhesion. The electrical resistance is obtained by a four‐point probe station to investigate the influence of plasma reaction and etching mechanism on the reproducibility of the electrical parameters. The proposed method is also successfully developed for the deposition of stacked layers structures, with the aim to design basic passive electrical components, such as a resistor or a capacitor. The possibility of realizing complex shapes by selective area deposition can enable the realization of advanced biosensor devices.