Direct Writing of 3D Micro/Nanostructures Based on Nanoscale Strong Electric Field of Electron Beam-Reference-Cited by-同舟云学术

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Direct Writing of 3D Micro/Nanostructures Based on Nanoscale Strong Electric Field of Electron Beam

Published:2022-09-11 Issue:1 Volume:25 Page:2200822
ISSN:1438-1656
Container-title:Advanced Engineering Materials
language:en
Short-container-title:Adv Eng Mater

Author:

Yang Guanghong¹^ORCID,Huang Xiaowei¹^ORCID,Jia Caihong²^ORCID

Affiliation:

1. Key Lab for Special Functional Materials of Ministry of Education School of Materials Henan University Kaifeng 475004 China

2. Henan Key Laboratory of Photovoltaic Materials Center for Topological Functional Materials Henan University Kaifeng 475004 China

Funder

Natural Science Foundation of Henan Province

Key Scientific Research Project of Colleges and Universities in Henan Province

Publisher

Wiley

Subject

Condensed Matter Physics,General Materials Science

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/adem.202200822

Reference44 articles.

1. More Moore International Roadmap for Devices and Systems (IRDS) http://irds.ieee.org/editions/2020 (accessed: January 2020).

2. T. J. K.Liu P.Zheng D.Connelly K.Kato R.Nguyen C.Qian A.Peschot IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S) Rohnert Park CA Octorber 2015.

3. Ultimate vertical gate-all-around metal–oxide–semiconductor field-effect transistor and its three-dimensional integrated circuits

4. Leveraging of MEMS Technologies for Optical Metamaterials Applications

5. Additive Manufacturing of Nano- and Microarchitected Materials

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