Development of x-ray and extreme ultraviolet (EUV) optical devices for diagnostics and instrumentation for various surface applications-Reference-Cited by-同舟云学术

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Development of x-ray and extreme ultraviolet (EUV) optical devices for diagnostics and instrumentation for various surface applications

Published:1999-04 Issue:4 Volume:27 Page:236-246
ISSN:0142-2421
Container-title:Surface and Interface Analysis
language:en
Short-container-title:Surf. Interface Anal.

Author:

Bruch R.,Merabet H.,Bailey M.,Showers S.,Schneider D.

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference50 articles.

1. Wilhelm Conrad Röntgen and the Glimmer of Light

2. Special Issue: X Rays 100 Years Later

3. . The Quantum Dot. Oxford University Press, Oxford (1996).

4. Single electron electronics: Challenge for nanofabrication

5. X-ray lithography: Status, challenges, and outlook for 0.13 μm

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1. Convergent-beam diffraction of ultra-short hard X-ray pulses focused by a capillary lens;Applied Physics B;2006-01-14

2. Extreme Ultraviolet Radiation from Pulsed Discharges:A New Access to “Nanoscopy” and “Nanolytics”;MicroNano Integration;2004

3. Plasma characterization in the extreme ultraviolet spectral range;SPIE Proceedings;2002-10-01

4. Development of diagnostic tools for the EUV spectral range;Emerging Lithographic Technologies VI;2002-07-05

5. Spectral characterization of EUV radiation emitted from a laser-irradiated gas puff target;Optics Communications;2001-12

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