Author:
Reichmanis Elsa,Nalamasu Omkaram,Houlihan Francis M,Novembre Anthony E
Subject
Polymers and Plastics,Materials Chemistry,Organic Chemistry
Reference37 articles.
1. and , Introduction to Microlithography, American Chemical Society, Washington DC (1994).
2. ACS Symposium;Hill,1984
3. Poly(butene‐1 sulfone) —A highly sensitive positive resist
Cited by
39 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献