68‐1: Distinguished Paper: An Active‐Matrix MicroLED Display Based on Monolithic Integration with IGZO Backplane

Author:

Durnan Oliver1,Kumar Vikrant1,Alshanbari Reem1,Noga Megan1,Kymissis Ioannis1

Affiliation:

1. Dept. of Electrical Engineering Columbia University New York, NY USA 10027

Abstract

We present a method of monolithically integrating GaN microLEDs with an IGZO TFT backplane to produce an activematrix microdisplay. After discussion of the fabrication process, individual LEDs, TFTs, and the integrated system are characterized. Results demonstrate a 32x32 pixel, 78.4 PPI microdisplay with luminance exceeding 1500 nits. This type of monolithic microdisplay forges the path forward for future high luminance integrated displays to enable augmented and mixed reality applications.

Publisher

Wiley

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