1. Suzhou Maxwell Technologies Co., Ltd. No. 1801 Pangjin Road Suzhou 215200 PR China
2. Ningbo Institute of Materials Technology and Engineering Chinese Academy of Sciences No. 1219 Zhongguan West Road Ningbo 315201 PR China
3. State Key Laboratory of Silicon Materials and School of Materials Science and Engineering Zhejiang University Hangzhou Zhejiang 310027 PR China