Neutral gas simulation on the influence of rotating spokes on gas rarefaction in high-power impulse magnetron sputtering
Author:
Affiliation:
1. Institute of Theoretical Electrical Engineering; Ruhr University Bochum; Bochum Germany
Funder
German Research Foundation Deutsche Forschungsgemeinschaft (DFG)
Publisher
Wiley
Subject
Condensed Matter Physics
Reference68 articles.
1. A sputtering wind
2. Magnetic Field Effects on an Abnormal Truncated Glow Discharge and Their Relation to Sputtered Thin‐Film Growth
3. Deposition and redeposition in magnetrons
4. High power impulse magnetron sputtering discharge
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