Understanding the Kinetics and Nanoscale Morphology of Electron-Beam-Induced Deposition via a Three-Dimensional Monte Carlo Simulation: The Effects of the Precursor Molecule and the Deposited Material-Reference-Cited by-同舟云学术

Understanding the Kinetics and Nanoscale Morphology of Electron-Beam-Induced Deposition via a Three-Dimensional Monte Carlo Simulation: The Effects of the Precursor Molecule and the Deposited Material

Published:2008-09 Issue:9 Volume:4 Page:1382-1389
ISSN:1613-6810
Container-title:Small
language:en
Short-container-title:Small

Author:

Smith Daryl A.,Fowlkes Jason D.,Rack Philip D.

Publisher

Wiley

Subject

Biomaterials,Biotechnology,General Materials Science,General Chemistry

Reference42 articles.

1. Approaching the Resolution Limit of Nanometer-Scale Electron Beam-Induced Deposition

2. Broadband Electrical Characterization of Multiwalled Carbon Nanotubes and Contacts

3. Focused-electron-beam-induced deposition of freestanding three-dimensional nanostructures of pure coalesced copper crystals

4. Constructive three-dimensional lithography with electron-beam induced deposition for quantum effect devices

5. Fabrication and characterization of platinum nanocrystalline material grown by electron-beam induced deposition

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