Affiliation:
1. Monolithically Integrated Actuator and Sensor Systems Fraunhofer Institute for Photonic Microsystems IPMS 01109 Dresden Germany
2. School of Engineering and Information Technology University of New South Wales Canberra 2612 Australia
3. Chair of Vibro‐Acoustics of Vehicles and Machines Technical University of Munich 85748 Garching Germany
Subject
General Physics and Astronomy,General Engineering,Biochemistry, Genetics and Molecular Biology (miscellaneous),General Materials Science,General Chemical Engineering,Medicine (miscellaneous)
Cited by
6 articles.
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