1. State Key Laboratory of Silicon and Advanced Semiconductor Materials and School of Materials Science and Engineering Zhejiang University Hangzhou 310058 China
2. Shanxi‐Zheda Institute of Advanced Materials and Chemical Engineering Taiyuan 030000 China
3. State Key Laboratory for Extreme Photonics and Instrumentation College of Optical Science and Engineering Intelligent Optics and Photonics Research Center Jiaxing Research Institute Zhejiang University Hangzhou 310058 China
4. ZJU‐Hangzhou Global Scientific and Technological Innovation Center Zhejiang University Hangzhou 310058 China