Bioinspired Suspended Sensing Membrane Array with Modulable Wedged‐Conductive Channels for Crosstalk‐Free and High‐Resolution Detection

Author:

Luo Haixuan12,Chen Xiaoliang12ORCID,Li Sheng1,Xu Jinbin2,Li Xiangming1,Tian Hongmiao1,Wang Chunhui1,Li Bo1,Zhang Manman1,Sun Bai2,He Juan3,Shao Jinyou123ORCID

Affiliation:

1. State Key Laboratory for Manufacturing Systems Engineering Xi'an Jiaotong University Xi'an Shaanxi 710049 China

2. Frontier Institute of Science and Technology (FIST) Xi'an Jiaotong University Xi'an Shaanxi 710049 China

3. Department of Rehabilitation First Affiliated Hospital of Xi'an Jiaotong University Xi'an Shaanxi 710061 China

Abstract

AbstractHigh spatial‐resolution detection is essential for biomedical applications and human‐machine interaction. However, as the sensor array density increases, the miniaturization will lead to interference between adjacent units and deterioration in sensing performance. Here, inspired by the cochlea's sensing structure, a high‐density flexible pressure sensor array featuring with suspended sensing membrane with sensitivity‐enhanced customized channels is presented for crosstalk‐free and high‐resolution detection. By imitating the basilar membrane attached to spiral ligaments, a sensing membrane is fixed onto a high‐stiffness substrate with cavities, forming a stable braced isolation to provide an excellent crosstalk‐free capability (crosstalk coefficient: 47.24 dB) with high‐density integration (100 units within 1 cm2). Similar to the opening of ion channels in hair cells, the wedge‐type expansion of the embedded cracks introduced by stress concentration structures enables a high sensitivity (0.19 kPa−1) and a large measuring range (400 kPa). Finally, it demonstrates promising applications in distributed displays and the condition monitoring of medical‐surgical intubation.

Funder

National Natural Science Foundation of China

Aeronautical Science Foundation of China

Publisher

Wiley

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