1. State Key Laboratory of Transducer Technology Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences Shanghai 200050 China
2. School of Graduate Study University of Chinese Academy of Sciences Beijing 100049 China
3. Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing 100049 China
4. 2020 X‐Lab Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences Shanghai 200050 China
5. School of Physical Science and Technology ShanghaiTech University Shanghai 200031 China