1. Department of Microsystems‐ IMS Faculty of TechnologyNatural Sciences and Maritime Sciences University of South‐Eastern Norway‐USN P.O. Box 235 Kongsberg 3603 Norway
2. Chongqing Key Laboratory of Micro‐Nano Systems and Intelligent Transduction Collaborative Innovation Center on Micro‐Nano Transduction and Intelligent Eco‐Internet of Things Chongqing Key Laboratory of Colleges and Universities on Micro‐Nano Systems Technology and Smart Transducing National Research Base of Intelligent Manufacturing Service Chongqing Technology and Business University Nan'an District Chongqing 400067 China
3. State Key Laboratory for Manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology Xi'an Jiaotong University Xi'an 710049 China