Modification Pathways for Copoly(2-oxazoline)s Enabling Their Application as Antireflective Coatings in Photolithography-Reference-Cited by-同舟云学术

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Modification Pathways for Copoly(2-oxazoline)s Enabling Their Application as Antireflective Coatings in Photolithography

Published:2015-11-30 Issue:3 Volume:37 Page:233-238
ISSN:1022-1336
Container-title:Macromolecular Rapid Communications
language:en
Short-container-title:Macromol. Rapid Commun.

Author:

Fimberger Martin¹²,Behrendt Andreas³,Jakopic Georg⁴,Stelzer Franz²,Kumbaraci Volkan⁵,Wiesbrock Frank¹

Affiliation:

1. Polymer Competence Center Leoben GmbH PCCL; Roseggerstrasse 12 8700 Leoben Austria

2. Institute for Chemistry and Technology of Materials; Graz University of Technology; NAWI Graz; Stremayrgasse 9/V 8010 Graz Austria

3. Infineon Technologies Austria AG; Siemensstraße 2 9500 Villach Austria

4. Institute for Surface Technologies and Photonics; Joanneum Research; Franz-Pichler-Strasse 30 8160 Weiz Austria

5. Department of Chemistry; Istanbul Technical University; Maslak TR-34469 Istanbul Turkey

Funder

Austrian Government and the State Governments of Styria, Lower Austria and Upper Austria

Publisher

Wiley

Subject

Materials Chemistry,Polymers and Plastics,Organic Chemistry

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/marc.201500589/fullpdf

Reference25 articles.

1. Organic Materials Challenges for 193 nm Imaging

2. Mobile Computing Has a Growing Impact on DSP Apps and Markets [Special Reports]

3. Deep-UV Chemically Amplified Dissolution-Inhibited Photoresists

4. Projection Masking, Thin Photoresist Layers and Interference Effects

5. Standing Waves in Photoresists

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1. Poly(2-isopropenyl-2-oxazoline) as a Versatile Functional Polymer for Biomedical Applications;Polymers;2024-06-14

2. Poly(2‐Oxazoline)s;Macromolecular Engineering;2022-03-04

3. Tuning the optical properties of GaAs solar cell through triple-layer antireflection coatings;Materials Today: Proceedings;2022

4. Cation−π Interactions Accelerate the Living Cationic Ring-Opening Polymerization of Unsaturated 2-Alkyl-2-oxazolines;Macromolecules;2020-05-04

5. Chemical characterization of marijuana blunt smoke by non-targeted chemical analysis;Inhalation Toxicology;2020-03-20

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