Microanalysis Using Secondary Ion Mass Spectrometry
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Published:1994-06
Issue:3
Volume:41
Page:329-333
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ISSN:0009-4536
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Container-title:Journal of the Chinese Chemical Society
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language:en
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Short-container-title:Jnl Chinese Chemical Soc
Subject
General Chemistry
Reference28 articles.
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2. Yeung , E. S. Lee , T. T. Hogan , B. L. 1993 Pittsburgh Conf. and Exposition of Anal. Chem. and Appl. Spectrosc
3. Application of electron and ion beam analysis techniques to microelectronics
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