Trace Water Vapor Analysis in Specialty Gases: Sensor and Spectroscopic Approaches

Author:

Raynor Mark W.,Bertness Kris A.,Cossel Kevin C.,Adler Florian,Ye Jun

Publisher

John Wiley & Sons, Inc.

Reference151 articles.

1. Techniques for the measurement of trace moisture in high-purity electronic specialty gases;Funke;Review of Scientific Instruments,2003

2. Trace moisture in ammonia: Gas chromatography using calcium carbide;Monroe;Journal of the Institute of Environmental Sciences and Technology,1998

3. Quantitative analysis of contaminants in ultrapure gases at the parts per trillion level using atmospheric pressure ionization mass spectroscopy;Siefering;Journal of Vacuum Science Technology A,1993

4. Use of ion mobility spectrometry to determine low levels of impurities in gases;Ketkar;Analytical Chemistry,2001

5. Ketkar , S. Dheandhanoo , S. Scott , A. 2004 Comparision of APIMS and IMS for the analysis of trace impurities in inert gases. SEMI Technology Symposium: Innovations in Semiconductor Manufacturing, Semicon West 2004, San Francisco, CA , pp. 89-108.

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