1. International Research Centre for Nano Handling and Manufacturing of China Changchun University of Science and Technology Changchun China
2. Ministry of Education Key Laboratory for Cross‐Scale Micro and Nano Manufacturing Changchun University of Science and Technology Changchun China
3. School of Engineering University of Warwick Coventry UK
4. JR3CN & IRAC University of Bedfordshire Luton UK
5. School of Electronic Information Engineering Changchun University of Science and Technology Changchun China
6. School of Electronic Information Engineering, Changchun University Changchun China