Coupling of Plasma Chemistry, Vibrational Kinetics, Collisional-Radiative Models and Electron Energy Distribution Function Under Non-Equilibrium Conditions-Reference-Cited by-同舟云学术

Coupling of Plasma Chemistry, Vibrational Kinetics, Collisional-Radiative Models and Electron Energy Distribution Function Under Non-Equilibrium Conditions

Published:2016-08-19 Issue:1-2 Volume:14 Page:1600109
ISSN:1612-8850
Container-title:Plasma Processes and Polymers
language:en
Short-container-title:Plasma Process. Polym.

Author:

Capitelli Mario¹,Colonna Gianpiero¹,D'Ammando Giuliano¹,Hassouni Khaled²,Laricchiuta Annarita¹,Pietanza Lucia Daniela¹

Affiliation:

1. PLASMI Lab, NANOTEC CNR; via Amendola 122/D Bari 70126 Italy

2. Laboratoire des Sciences des Procédés et des Matériaux-LSPM, CNRS-UPR3407; Institut Galilée; Université Paris 13, Campus de Villetaneuse, 99 Avenue Jean-Baptiste Clément Villetaneuse 93430 Paris France

Publisher

Wiley

Subject

Polymers and Plastics,Condensed Matter Physics

Reference62 articles.

1. Effect of discharge voltage on capacitively coupled, parallel plate rf hydrogen plasmas

2. Chemical kinetics and energy transfer in moderate pressure H2plasmas used in diamond MPACVD processes

3. A computational analysis of the vibrational levels of molecular oxygen in low-pressure stationary and transient radio-frequency oxygen plasma

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