Plasma-enhanced Chemical Vapor Deposition of Aluminum Oxide Using Ultrashort Precursor Injection Pulses
Author:
Publisher
Wiley
Subject
Polymers and Plastics,Condensed Matter Physics
Reference63 articles.
1. Plasma-assisted atomic layer deposition of Al2O3 moisture permeation barriers on polymers
2. Ultrathin Film Encapsulation of an OLED by ALD
3. Gas diffusion barriers on polymers using Al2O3 atomic layer deposition
4. Atomic layer deposited thin films for corrosion protection
5. Ultra-Thin Aluminium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition for Corrosion Protection
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